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Testing project
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Testing device
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Model
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Accuracy scope
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Crystal structure
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High resolution XRD
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PANalytical X'pert3 MRD
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Swing curve, ω / 2θ scan, triaxial crystal resolution 12 ”
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Electric quality
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Hall test system
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Nanometrics HL5500PC
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Support low temperature 77K test
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Optical quality
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Photoluminescence Spectroscopy
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Nanometrics RPMBlue
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532nm laser, measurable wavelength 400-2040nm
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Doping concentration
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Electrochemical ECV
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Nanometrics ECVpro
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Carrier concentration 1E13 ~ 1E20cm-3, corrosion depth range 50nm ~ 50μm
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Surface resistance
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Non-contact thin film resistance tester
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Lehighton LEI1510EC
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Resistivity 0.01-200Ω-cm
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High resistance
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Non-contact thin film high resistance tester
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SemiMap Corema-ER
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Resistivity 1E5 ~ 1E12 ohm-cm
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Surface defects
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Surface defect analysis
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KLA Candela 8420
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Smallest particle 80nm diameter
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Optical information
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spectrometer
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PerkinElmer Lambda950
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Spectral wavelength 200-3300nm
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Material thickness
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Level gauge
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KLA P-7
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Maximum resolution 0.5?
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Surface topography
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Polarizing microscope
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Leica DM3 XL
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1000 times optical magnification
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Surface topography
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scanning electron microscope
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FEI Apreo
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Gold sprayable, with 1nm of minimum accuracy
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